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Updated: Sep 22 2026
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Silicon EPI Wafers

6" Wafers, 4" Wafers, 3" Wafers
6" Wafers
Note: Surface - P = Polished, E = Etched, C = AsCut, G = Ground, Ox = Oxide (on that surface)
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Cart		 Item Qty in Stock Price $/wafer Substrate (bottom) EPI Source Comment
Size Type-Dopant Res Ωcm Surf. Thick μm Type-Dopant Res Ωcm
5541 65 $42.60 6"Ø×675μm n- Si:P[100] 0.001-0.002 P/EOx 3.20 ±0.16 n- Si:P (Top) 0.32-0.46 Montco n/n+

4" Wafers
Note: Surface - P = Polished, E = Etched, C = AsCut, G = Ground, Ox = Oxide (on that surface)
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Cart		 Item Qty in Stock Price $/wafer Substrate (bottom) EPI Source Comment
Size Type-Dopant Res Ωcm Surf. Thick μm Type-Dopant Res Ωcm
13562 25 $120.00 4"Ø×525μm p- Si:B[111] 0.004-0.006 P/E 8 ±1 n- Si:P 0.006-0.010 XI due 10/22 n/p, Individual single-wafer-shippers
13001 20 $200.00 4"Ø×420μm p- Si:B[111] 0.001-0.002 P/E 35 ±2 n- Si:As ~0.0042 NT n/p
6892 7 $88.00 4"Ø×525μm n- Si:As[111] 0.0010-0.0035 P/E 5 ±0.4
15 ±1.2
30 ±2.25		 n- Si:P
n- Si:P
n- Si:P (Top)		 1.35-1.65
3.6-4.4
9.9-12.1		 ITME n/n/n/n+
C851 5 $59.80 4"Ø×400μm n- Si:As[111] 0.001-0.005 P/E 20.0 ±2.0 n- Si:P 0.081-0.099 ITME n/n+
J892 4 $120.00 4"Ø×525μm n- Si:Sb[111] 0.008-0.020 P/E 5 ±0.5
15 ±1.5
58 ±6		 n- Si:P
n- Si:P
n- Si:P (Top)		 2.7-3.3
7.2-8.8
59.4-60.6		 ITME n/n/n/n+

3" Wafers
Note: Surface - P = Polished, E = Etched, C = AsCut, G = Ground, Ox = Oxide (on that surface)
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Cart		 Item Qty in Stock Price $/wafer Substrate (bottom) EPI Source Comment
Size Type-Dopant Res Ωcm Surf. Thick μm Type-Dopant Res Ωcm
7762 5 $58.00 3"Ø×381μm n- Si:As[111] 0.001-0.005 P/E 13 ±1.3 n- Si:P (Top) 1.17-1.43 ITME n/n+
F667 96 $28.00 3"Ø×525μm n- Si:P[111] 0.001-0.005 P/E 4.5 n- Si:P (Top) 1.1-1.4 Motrla n/n+, Red Phos substrates, in 24 wafer cassettes

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